Publication:

Systematic study of shallow junction formation on Germanium substrates

Date

2010
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Author(s)

Hellings, Geert  
;
Rosseel, Erik  
;
Clarysse, Trudo
;
Petersen, Dirch Hjorth
;
Hansen, Ole
;
Nielsen, Peter Folmer
;
Simoen, Eddy  
;
Eneman, Geert  
;
De Jaeger, Brice  
;
Hoffmann, Thomas Y.
;
De Meyer, Kristin  
;
Vandervorst, Wilfried  

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