Publication:
Linking EUV lithography line edge roughness and 16 nm NAND memory performance
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1929 since deposited on 2021-10-20
3last month
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Acq. date: 2026-08-07
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Statistics
Views
1929 since deposited on 2021-10-20
3last month
1last week
Acq. date: 2026-08-07
Citations