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In pursuit of "super"high-k ternary oxides: aqueous CSD and material properties

Date

2008
Proceedings Paper
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dc.contributor.authorHardy, An
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorHeyns, Marc
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorMullens, Jules
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.date.accessioned2021-10-17T07:32:28Z
dc.date.available2021-10-17T07:32:28Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13841
dc.source.beginpageH03-04
dc.source.conferenceMaterials Science of High-k Dielectric Stacks - From Fundamentals to Technology
dc.source.conferencedate24/03/2008
dc.source.conferencelocationSan Francisco, CA USA
dc.title

In pursuit of "super"high-k ternary oxides: aqueous CSD and material properties

dc.typeProceedings paper
dspace.entity.typePublication
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