Publication:
Epitaxial Ge-on-Nothing and Epitaxial Ge on Si-on-Nothing as Virtual Substrates for 3D Device Stacking Technologies
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Porret, Clément | |
| dc.contributor.author | Han, Han | |
| dc.contributor.author | Srinivasan, Ashwyn | |
| dc.contributor.author | Vecchio, Emma | |
| dc.contributor.author | Depauw, Valerie | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Porret, Clément | |
| dc.contributor.imecauthor | Han, Han | |
| dc.contributor.imecauthor | Srinivasan, Ashwyn | |
| dc.contributor.imecauthor | Vecchio, Emma | |
| dc.contributor.imecauthor | Depauw, Valerie | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.contributor.orcidimec | Porret, Clément::0000-0002-4561-348X | |
| dc.contributor.orcidimec | Han, Han::0000-0003-2169-8332 | |
| dc.contributor.orcidimec | Depauw, Valerie::0000-0003-2045-9698 | |
| dc.date.accessioned | 2022-03-02T09:11:00Z | |
| dc.date.available | 2022-03-02T09:11:00Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1149/2162-8777/ac1a0b | |
| dc.identifier.issn | 2162-8769 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39207 | |
| dc.publisher | ELECTROCHEMICAL SOC INC | |
| dc.source.beginpage | 084003 | |
| dc.source.issue | 8 | |
| dc.source.journal | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | |
| dc.source.numberofpages | 7 | |
| dc.source.volume | 10 | |
| dc.subject.keywords | GERMANIUM | |
| dc.subject.keywords | COALESCENCE | |
| dc.subject.keywords | LAYERS | |
| dc.title | Epitaxial Ge-on-Nothing and Epitaxial Ge on Si-on-Nothing as Virtual Substrates for 3D Device Stacking Technologies | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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