Publication:
Materials issues of surfaces and interfaces in IC interconnections and contacts
Date
| dc.contributor.author | Li, Hua | |
| dc.contributor.thesisadvisor | Maex, Karen | |
| dc.contributor.thesisadvisor | Froyen, Ludo | |
| dc.date.accessioned | 2021-10-15T05:23:17Z | |
| dc.date.available | 2021-10-15T05:23:17Z | |
| dc.date.issued | 2003-05 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7802 | |
| dc.title | Materials issues of surfaces and interfaces in IC interconnections and contacts | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |