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High performance high-k/metal gate Ge pMOSFETs with gate lengths down to 125 nm and halo implant

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1861 since deposited on 2021-10-16
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Acq. date: 2026-08-06

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1861 since deposited on 2021-10-16
2last month
2last week
Acq. date: 2026-08-06

Citations