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High performance high-k/metal gate Ge pMOSFETs with gate lengths down to 125 nm and halo implant

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1854 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-09

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1854 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-09

Citations