Publication:
Stable patterned electrets for MEMS based energy harvesters
Date
| dc.contributor.author | Van Bavel, Mieke | |
| dc.contributor.author | Leonov, Vladimir | |
| dc.contributor.author | van Schaijk, Rob | |
| dc.contributor.imecauthor | Van Bavel, Mieke | |
| dc.contributor.imecauthor | Leonov, Vladimir | |
| dc.contributor.orcidimec | Leonov, Vladimir::0000-0002-4364-8945 | |
| dc.date.accessioned | 2021-10-18T22:49:36Z | |
| dc.date.available | 2021-10-18T22:49:36Z | |
| dc.date.issued | 2010-09 | |
| dc.identifier.issn | ? | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18150 | |
| dc.identifier.url | http://www.memsinvestorjournal.com/2010/09/stable-patterned-electrets-for-mems-based-energy-harvesters.html | |
| dc.source.journal | MEMS Investor Journal | |
| dc.title | Stable patterned electrets for MEMS based energy harvesters | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |