Publication:
TaN metal gate etch with BCl3/O2 plamsa: gate profile and impact on high-k removal process
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1972 since deposited on 2021-10-16
2last month
Acq. date: 2026-08-29
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Statistics
Views
1972 since deposited on 2021-10-16
2last month
Acq. date: 2026-08-29
Citations