Publication:

RBS applied to 3D nanostructures

Date

2022-07-17
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dc.contributor.authorClaessens, Niels
dc.contributor.authorCouture, Pierre
dc.contributor.authorEngland, Jonathan
dc.contributor.authorDelabie, Annelies
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorVantomme, Andre
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMeersschaut, Johan
dc.contributor.imecauthorClaessens, Niels
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.orcidimecClaessens, Niels::0000-0002-8863-9532
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2022-12-01T09:27:49Z
dc.date.available2022-06-13T09:25:57Z
dc.date.available2022-06-29T07:36:44Z
dc.date.available2022-12-01T09:27:49Z
dc.date.issued2022-07-17
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39948
dc.source.conferenceECAART14
dc.source.conferencedate2022-07-17
dc.source.conferencelocationSibiu (Romenia)
dc.subject.disciplineApplied physics
dc.title

RBS applied to 3D nanostructures

dc.typeOral presentation
dspace.entity.typePublication
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