Publication:

Demonstration of MP18-26nm Ru Semi-Damascene Spacer-is-Dielectric SADP Integration

Date

2024

Proceedings Paper

https://doi.org/10.1109/iitc61274.2024.10732062

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Author(s)

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Decoster, Stefan

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Renaud, Vincent

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Hermans, Yannick

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Marien, Philippe

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Roy, Syamashree

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Ulu Okudur, Fulya

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Sepulveda Marquez, Alfonso

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Lesniewska, Alicja

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Journal

N/A

Statistics

117 since deposited on 2025-03-06

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Acq. date: 2026-10-13