Publication:

Demonstration of MP18-26nm Ru Semi-Damascene Spacer-is-Dielectric SADP Integration

Date

2024
Proceedings Paper
https://doi.org/10.1109/IITC61274.2024.10732062
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Author(s)

Wu, Chen  
;
Decoster, Stefan  
;
Renaud, Vincent  
;
Hermans, Yannick  
;
Marien, Philippe  
;
Marti, Giulio  
;
Heylen, Nancy  
;
Kenens, Bart  
;
Roy, Syamashree  
;
Ulu Okudur, Fulya  
;
Le, Quoc Toan  
;
Reddy, Naveen  
;
Sepulveda Marquez, Alfonso  
;
Delie, Gilles  
;
Gupta, Anshul  
;
Lesniewska, Alicja  
;
Murdoch, Gayle  
;
Park, Seongho  
;
Tokei, Zsolt  

Journal

N/A

Abstract

Description

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79 since deposited on 2025-03-06
Acq. date: 2025-10-23

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79 since deposited on 2025-03-06
Acq. date: 2025-10-23

Citations