Publication:

Demonstration of MP18-26nm Ru Semi-Damascene Spacer-is-Dielectric SADP Integration

Date

2024

Proceedings Paper

https://doi.org/10.1109/iitc61274.2024.10732062

Simple item page Full metadata Statistics

Author(s)

;

Decoster, Stefan

;

Renaud, Vincent

;

Hermans, Yannick

;

Marien, Philippe

;

;

;

;

Roy, Syamashree

;

Ulu Okudur, Fulya

;

;

;

Sepulveda Marquez, Alfonso

;

;

;

Lesniewska, Alicja

;

;

;

Journal

N/A

Statistics

108 since deposited on 2025-03-06

20last month

Acq. date: 2026-07-19