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Development and synchrotron-based characterization of Al and Cr nanostructures as potential calibration samples for 3D analytical techniques

Date

2018
Journal article
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dc.contributor.authorDialameh, Masoud
dc.contributor.authorFerrarese Lupi, Federico
dc.contributor.authorHönicke, Philipp
dc.contributor.authorKayser, Yves
dc.contributor.authorBeckhoff, Burkhard
dc.contributor.authorWeimann, Thomas
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDub "cek, Pavo
dc.contributor.authorPivac, Branko
dc.contributor.authorPerego, Michele
dc.contributor.authorSeguini, Gabriele
dc.contributor.authorDe Leo, Natascia
dc.contributor.authorBoarino, Luca
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.date.accessioned2021-10-25T18:14:46Z
dc.date.available2021-10-25T18:14:46Z
dc.date.issued2018
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30634
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201700866/abstract
dc.source.beginpage1700866
dc.source.issue6
dc.source.journalPhysica Status Solidi A
dc.source.volume215
dc.title

Development and synchrotron-based characterization of Al and Cr nanostructures as potential calibration samples for 3D analytical techniques

dc.typeJournal article
dspace.entity.typePublication
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