Publication:
A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches
Date
| dc.contributor.author | van Spengen, Merlijn | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.author | Mertens, Robert | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.contributor.imecauthor | Mertens, Robert | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-15T17:15:27Z | |
| dc.date.available | 2021-10-15T17:15:27Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9795 | |
| dc.source.beginpage | 514 | |
| dc.source.endpage | 521 | |
| dc.source.issue | 4 | |
| dc.source.journal | Journal of Micromechanics and Microengineering | |
| dc.source.volume | 14 | |
| dc.title | A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |