Publication:
Basics, properties and limitations of SIMS in nanometer scale semiconductor technologies
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-16T06:33:41Z | |
| dc.date.available | 2021-10-16T06:33:41Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11464 | |
| dc.source.conference | Forschungszentrum Rossendorf | |
| dc.source.conferencedate | 3/11/2005 | |
| dc.source.conferencelocation | Rossendorf Germany | |
| dc.title | Basics, properties and limitations of SIMS in nanometer scale semiconductor technologies | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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