Publication:
Oxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMP
Date
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.author | Moinpour, Mansour | |
| dc.contributor.author | Whelan, Caroline | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Hernandez, Jose Luis | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.imecauthor | Hernandez, Jose Luis | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.date.accessioned | 2021-10-16T15:00:50Z | |
| dc.date.available | 2021-10-16T15:00:50Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11655 | |
| dc.source.conference | CMP-MIC Conference Proceedings | |
| dc.source.conferencedate | 6/03/2007 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | Oxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMP | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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