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Improving low-temperature APCVD SiO2 passivation by rapid themal annealing for Si devices
Publication:
Improving low-temperature APCVD SiO2 passivation by rapid themal annealing for Si devices
Date
1998
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sivoththaman, Sivanarayanamoorthy
;
De Schepper, Patrick
;
Laureys, Wim
;
Nijs, Johan
;
Mertens, Robert
Journal
IEEE Electron Device Letters
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1915
since deposited on 2021-10-01
Acq. date: 2025-10-24
Citations
Metrics
Views
1915
since deposited on 2021-10-01
Acq. date: 2025-10-24
Citations