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Selective epitaxial deposition of Ge on Si: facet formation and how to avoid it
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Selective epitaxial deposition of Ge on Si: facet formation and how to avoid it
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Date
2008
Meeting abstract
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16929.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wang, Gang
;
Leys, Frederik
;
Loo, Roger
;
Caymax, Matty
;
Brunco, David
;
Meuris, Marc
;
Vandervorst, Wilfried
;
Heyns, Marc
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1788
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations
Metrics
Views
1788
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations