Publication:
The effect of polyether suppressors on the nucleation and growth of copper on RuTa seeded substrate for direct copper plating
Date
| dc.contributor.author | Nagar, Magi | |
| dc.contributor.author | Radisic, Alex | |
| dc.contributor.author | Strubbe, Katrien | |
| dc.contributor.author | Vereecken, Philippe | |
| dc.contributor.imecauthor | Radisic, Alex | |
| dc.contributor.imecauthor | Vereecken, Philippe | |
| dc.contributor.orcidimec | Vereecken, Philippe::0000-0003-4115-0075 | |
| dc.date.accessioned | 2021-10-22T04:10:31Z | |
| dc.date.available | 2021-10-22T04:10:31Z | |
| dc.date.issued | 2014 | |
| dc.identifier.issn | 0013-4686 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24305 | |
| dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0013468614003545 | |
| dc.source.beginpage | 315 | |
| dc.source.endpage | 326 | |
| dc.source.journal | Electrochimica Acta | |
| dc.source.volume | 127 | |
| dc.title | The effect of polyether suppressors on the nucleation and growth of copper on RuTa seeded substrate for direct copper plating | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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