Publication:
Challenges in wet processing of high aspect ratio nanostructures
Date
| dc.contributor.author | Xu, XiuMei | |
| dc.contributor.imecauthor | Xu, XiuMei | |
| dc.contributor.orcidimec | Xu, XiuMei::0000-0002-3356-8693 | |
| dc.date.accessioned | 2021-10-24T19:30:31Z | |
| dc.date.available | 2021-10-24T19:30:31Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/29980 | |
| dc.source.conference | Semicon Korea | |
| dc.source.conferencedate | 8/02/2017 | |
| dc.source.conferencelocation | Seoul Korea | |
| dc.title | Challenges in wet processing of high aspect ratio nanostructures | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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