Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics

dc.contributor.author	Edinger, Pierre
dc.contributor.author	Errando-Herranz, Carlos
dc.contributor.author	Takabayashi, Alain Yuji
dc.contributor.author	Sattari, Hamed
dc.contributor.author	Quack, Niels
dc.contributor.author	Verheyen, Peter
dc.contributor.author	Bogaerts, Wim
dc.contributor.author	Gylfason, Kristinn B.
dc.contributor.imecauthor	Verheyen, Peter
dc.contributor.imecauthor	Bogaerts, Wim
dc.contributor.orcidimec	Verheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimec	Bogaerts, Wim::0000-0003-1112-8950
dc.date.accessioned	2021-12-15T09:11:17Z
dc.date.available	2021-11-02T16:04:46Z
dc.date.available	2021-12-15T09:11:17Z
dc.date.issued	2020
dc.identifier.eisbn	978-1-943580-76-7
dc.identifier.issn	2160-9020
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/38160
dc.publisher	IEEE
dc.source.conference	Conference on Lasers and Electro-Optics (CLEO)
dc.source.conferencedate	MAY 10-15, 2020
dc.source.conferencelocation	San Jose
dc.source.journal	na
dc.source.numberofpages	2
dc.title	Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics
dc.type	Proceedings paper
dspace.entity.type	Publication
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