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The use of semi-empirical CMP model for the optimisation of the STI-module
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The use of semi-empirical CMP model for the optimisation of the STI-module
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Date
1999
Proceedings Paper
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3434.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Grillaert, Joost
;
Meuris, Marc
;
Vrancken, Evi
;
Heylen, Nancy
;
Devriendt, Katia
;
Fyen, Wim
;
Heyns, Marc
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1842
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Acq. date: 2025-12-16
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Metrics
Views
1842
since deposited on 2021-10-06
1
last month
Acq. date: 2025-12-16
Citations