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Atomically controlled processing for dopant segregation in CVD Si and Ge epitaxial growth
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Atomically controlled processing for dopant segregation in CVD Si and Ge epitaxial growth
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Date
2017-05
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Murota, Junichi
;
Yamamoto, Yuchi
;
Costina, Ioan
;
Tillack, Bernd
;
Le Thanh, Vin
;
Loo, Roger
;
Caymax, Matty
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1906
since deposited on 2021-10-24
Acq. date: 2025-12-14
Citations
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Views
1906
since deposited on 2021-10-24
Acq. date: 2025-12-14
Citations