Publication:

Low thermal budget PBTI and NBTI reliability solutions for multi-V-th CMOS RMG stacks based on atomic oxygen and hydrogen treatments

Date

2022
Proceedings Paper
https://doi.org/10.1109/IEDM45625.2022.10019385
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dc.contributor.authorFranco, Jacopo
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorClaes, Dieter
dc.contributor.authorBrus, Stephan
dc.contributor.authorVandooren, Anne
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorCroes, Kristof
dc.contributor.authorKaczer, Ben
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorClaes, Dieter
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorVandooren, Anne
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorKaczer, Ben
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecde Marneffe, Jean-Francois::0000-0001-5178-6670
dc.contributor.orcidimecBrus, Stephan::0000-0003-3554-0640
dc.contributor.orcidimecVandooren, Anne::0000-0002-2412-0176
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecArimura, Hiroaki::0000-0002-3138-708X
dc.contributor.orcidimecClaes, Dieter::0000-0002-0356-0973
dc.date.accessioned2023-06-01T14:48:38Z
dc.date.available2023-05-25T20:20:01Z
dc.date.available2023-06-01T14:48:38Z
dc.date.issued2022
dc.description.wosFundingTextResearch funded by imec's Core Partner Program.
dc.identifier.doi10.1109/IEDM45625.2022.10019385
dc.identifier.eisbn978-1-6654-8959-1
dc.identifier.issn2380-9248
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41620
dc.publisherIEEE
dc.source.conferenceInternational Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 03-07, 2022
dc.source.conferencelocationSan Francisco
dc.source.journalna
dc.source.numberofpages4
dc.title

Low thermal budget PBTI and NBTI reliability solutions for multi-V-th CMOS RMG stacks based on atomic oxygen and hydrogen treatments

dc.typeProceedings paper
dspace.entity.typePublication
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