Publication:

CD Control: The limiting factor for i-line and deep-UV lithography?

Date

1995

Proceedings Paper

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Files

813.pdf 950.27 KB

Author(s)

;

;

Op de Beeck, Maaike

;

Van den hove, Luc

Statistics

2085 since deposited on 2021-09-29

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Acq. date: 2026-04-26