Publication:
Effectiveness of nitridation of hafnium silicate dielectrics: a comparison between thermal and plasma nitridation
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1938 since deposited on 2021-10-16
2last month
Acq. date: 2025-12-08
Citations
Metrics
Views
1938 since deposited on 2021-10-16
2last month
Acq. date: 2025-12-08
Citations