Publication:
Effectiveness of nitridation of hafnium silicate dielectrics: a comparison between thermal and plasma nitridation
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1941 since deposited on 2021-10-16
1last month
Acq. date: 2026-02-24
Citations
Statistics
Views
1941 since deposited on 2021-10-16
1last month
Acq. date: 2026-02-24
Citations