Publication:

Influence of capping layer deterioration on printing performance as estimated from simulation

Date

2009
Proceedings Paper
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dc.contributor.authorJonckheere, Rik
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.date.accessioned2021-10-17T23:12:30Z
dc.date.available2021-10-17T23:12:30Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15544
dc.source.conferenceEUV Mask Cleaning Workshop
dc.source.conferencedate14/09/2009
dc.source.conferencelocationMonterey, CA USA
dc.title

Influence of capping layer deterioration on printing performance as estimated from simulation

dc.typeProceedings paper
dspace.entity.typePublication
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