Publication:
Epitaxial erbium silicide contact to silicon-germanium
Date
| dc.contributor.author | Horvath, Z. | |
| dc.contributor.author | Molnart, G. | |
| dc.contributor.author | Peto, G. | |
| dc.contributor.author | Deszi, I. | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Z'd'ansky, K. | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-15T04:56:32Z | |
| dc.date.available | 2021-10-15T04:56:32Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7662 | |
| dc.source.conference | International Conference Micro- and Nanoelectronics - ICMNE | |
| dc.source.conferencedate | 6/10/2003 | |
| dc.source.conferencelocation | Moscow Russia | |
| dc.title | Epitaxial erbium silicide contact to silicon-germanium | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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