Publication:

Focused ion beam analysis of organic low-k dielectrics

Date

2000
Proceedings Paper
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dc.contributor.authorBender, Hugo
dc.contributor.authorAlves Donaton, Ricardo
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-10-14T12:40:47Z
dc.date.available2021-10-14T12:40:47Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4114
dc.source.beginpage397
dc.source.conferenceProceedings of the 26th International Symposium on Testing and Failure Analysis - ISTFA
dc.source.conferencedate12/11/2000
dc.source.conferencelocationBellevue, WA USA
dc.source.endpage405
dc.title

Focused ion beam analysis of organic low-k dielectrics

dc.typeProceedings paper
dspace.entity.typePublication
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