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Residual stresses in tungsten lines: analysis of experimental (micro-Raman spectroscopy, XRD) and numerical results

Date

1995
Proceedings Paper
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dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorMaes, Herman
dc.contributor.authorMoffet, J.
dc.contributor.authorIgnat, M.
dc.contributor.imecauthorDe Wolf, Ingrid
dc.date.accessioned2021-09-29T13:05:13Z
dc.date.available2021-09-29T13:05:13Z
dc.date.embargo9999-12-31
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/598
dc.source.beginpage109
dc.source.conferenceMaterials Reliability in Microelectronics V
dc.source.conferencedate17/04/1995
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpage114
dc.title

Residual stresses in tungsten lines: analysis of experimental (micro-Raman spectroscopy, XRD) and numerical results

dc.typeProceedings paper
dspace.entity.typePublication
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