Publication:

Improvement of the poly-SiGe electrode contact technology for MEMS

Date

2010
Journal article
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dc.contributor.authorClaes, Gert
dc.contributor.authorSeveri, Simone
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorWitvrouw, Ann
dc.contributor.imecauthorSeveri, Simone
dc.date.accessioned2021-10-18T15:36:54Z
dc.date.available2021-10-18T15:36:54Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16877
dc.source.beginpage95029
dc.source.issue9
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.volume20
dc.title

Improvement of the poly-SiGe electrode contact technology for MEMS

dc.typeJournal article
dspace.entity.typePublication
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