Publication:
Optimisation of a thin epitaxial Si layer as Ge passivation layer to demonstrate deep sub-micron n- and p-FETs on Ge-On-Insulator substrates
Date
dc.contributor.author | De Jaeger, Brice | |
dc.contributor.author | Bonzom, Renaud | |
dc.contributor.author | Leys, Frederik | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Van Steenbergen, Jan | |
dc.contributor.author | Winderickx, Gillis | |
dc.contributor.author | Van Moorhem, Els | |
dc.contributor.author | Raskin, G. | |
dc.contributor.author | Letertre, F. | |
dc.contributor.author | Billon, T. | |
dc.contributor.author | Meuris, Marc | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.imecauthor | De Jaeger, Brice | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Van Steenbergen, Jan | |
dc.contributor.imecauthor | Winderickx, Gillis | |
dc.contributor.imecauthor | Van Moorhem, Els | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | De Jaeger, Brice::0000-0001-8804-7556 | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.date.accessioned | 2021-10-16T01:08:04Z | |
dc.date.available | 2021-10-16T01:08:04Z | |
dc.date.issued | 2005-06 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10299 | |
dc.source.beginpage | 26 | |
dc.source.endpage | 29 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.volume | 80 | |
dc.title | Optimisation of a thin epitaxial Si layer as Ge passivation layer to demonstrate deep sub-micron n- and p-FETs on Ge-On-Insulator substrates | |
dc.type | Journal article | |
dspace.entity.type | Publication | |
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