Universal perpendicular orientation of block copolymer microdomains using a filtered plasma

dc.contributor.author	Oh, Jinwoo
dc.contributor.author	Suh, Hyo Seon
dc.contributor.author	Ko, Youngpyo
dc.contributor.author	Nah, Yoonseo
dc.contributor.author	Lee, Jong-Chan
dc.contributor.author	Yeom, Bongjun
dc.contributor.author	Char, Kookheon
dc.contributor.author	Ross, Caroline A.
dc.contributor.author	Son, Jeong Gon
dc.contributor.imecauthor	Suh, Hyo Seon
dc.date.accessioned	2021-10-27T14:58:46Z
dc.date.available	2021-10-27T14:58:46Z
dc.date.embargo	9999-12-31
dc.date.issued	2019
dc.identifier.issn	2041-1723
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/33689
dc.identifier.url	https://www.nature.com/articles/s41467-019-10907-5
dc.source.beginpage	2912
dc.source.journal	Nature Communications
dc.source.volume	10
dc.title	Universal perpendicular orientation of block copolymer microdomains using a filtered plasma
dc.type	Journal article
dspace.entity.type	Publication
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