Publication:

Implementation of DSA for electrical test vehicles at the 7 nm node

Date

2015
Proceedings Paper
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dc.contributor.authorGronheid, Roel
dc.contributor.authorDoise, Jan
dc.contributor.authorBekaert, Joost
dc.contributor.authorChan, BT
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorKarageorgos, Ioannis
dc.contributor.authorRyckaert, Julien
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorSayan, Safak
dc.contributor.authorLin, Guanyang
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-22T19:31:32Z
dc.date.available2021-10-22T19:31:32Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25341
dc.source.conferenceE-MRS Spring Meeting
dc.source.conferencedate11/05/2015
dc.source.conferencelocationLille France
dc.title

Implementation of DSA for electrical test vehicles at the 7 nm node

dc.typeProceedings paper
dspace.entity.typePublication
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