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Characterization of silicon carbon nitride for low temperature wafer-to-wafer direct bonding
Publication:
Characterization of silicon carbon nitride for low temperature wafer-to-wafer direct bonding
Date
2020
Meeting abstract
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Nagano, Fuya
;
Iacovo, Serena
;
Phommahaxay, Alain
;
Inoue, Fumihiro
;
Sleeckx, Erik
;
De Gendt, Stefan
;
Beyer, Gerald
;
Beyne, Eric
Journal
Abstract
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Views
2016
since deposited on 2021-10-29
Acq. date: 2025-10-27
Citations
Metrics
Views
2016
since deposited on 2021-10-29
Acq. date: 2025-10-27
Citations