Publication:
Thermal recovery from stress-induced high-k dielectric film degradation
Date
| dc.contributor.author | O'Sullivan, Barry | |
| dc.contributor.author | Pantisano, Luigi | |
| dc.contributor.author | Roussel, Philippe | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.imecauthor | O'Sullivan, Barry | |
| dc.contributor.imecauthor | Roussel, Philippe | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.orcidimec | O'Sullivan, Barry::0000-0002-9036-8241 | |
| dc.contributor.orcidimec | Roussel, Philippe::0000-0002-0402-8225 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-10-16T18:23:57Z | |
| dc.date.available | 2021-10-16T18:23:57Z | |
| dc.date.issued | 2007-02 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12660 | |
| dc.source.beginpage | 44515 | |
| dc.source.issue | 4 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 101 | |
| dc.title | Thermal recovery from stress-induced high-k dielectric film degradation | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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