Publication:

Nickel-plated thermal actuator with electrostatic latch

Date

2008
Proceedings Paper
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Author(s)

Driesen, Maarten
;
Ceyssens, Frederik  
;
De Coster, Jeroen  
;
Puers, Robert

Journal

Abstract

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1944 since deposited on 2021-10-17
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Acq. date: 2026-08-10

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