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Thermal Modeling and Analysis of Equivalent Thermal Properties for Advanced BEOL Stacks

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dc.contributor.authorChang, Xinyue
dc.contributor.authorVermeersch, Bjorn
dc.contributor.authorOprins, Herman
dc.contributor.authorLofrano, Melina
dc.contributor.authorCherman, Vladimir
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorChang, Xinyue
dc.contributor.imecauthorVermeersch, Bjorn
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecChang, Xinyue::0000-0003-1875-6132
dc.contributor.orcidimecVermeersch, Bjorn::0000-0001-8640-672X
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecLofrano, Melina::0000-0002-3930-6459
dc.contributor.orcidimecCherman, Vladimir::0000-0002-8068-9236
dc.contributor.orcidimecPark, Seongho::0000-0002-1058-9424
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2025-09-03T04:00:19Z
dc.date.available2025-09-03T04:00:19Z
dc.date.issued2025-AUG
dc.description.wosFundingTextThis work was supported as part of the IMEC Industrial Affiliation Program on Nano-Interconnect and has been strongly supported by the IMEC partners and the IMEC Reliability, Electrical testing, Modeling, and Nano-IC teams.
dc.identifier.doi10.1109/tcpmt.2025.3564833
dc.identifier.doi10.1109/TCPMT.2025.3564833
dc.identifier.issn2156-3950
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/46145
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage1708
dc.source.endpage1716
dc.source.issue8
dc.source.journalIEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY
dc.source.numberofpages9
dc.source.volume15
dc.subject.keywordsCONDUCTIVITY
dc.title

Thermal Modeling and Analysis of Equivalent Thermal Properties for Advanced BEOL Stacks

dc.typeJournal article
dspace.entity.typePublication
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