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Advanced RBS analysis of thin films in micro-electronics
Publication:
Advanced RBS analysis of thin films in micro-electronics
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Date
2001
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brijs, Bert
;
Deleu, Jeroen
;
Huyghebaert, Cedric
;
Nauwelaerts, Sophie
;
Nakajima, K.
;
Kimura, K.
;
Vandervorst, Wilfried
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1947
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-09
Citations
Metrics
Views
1947
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-09
Citations