Publication:

Impact of process variability on BEOL TDDB lifetime model assessment

Date

 
dc.contributor.authorCroes, Kristof
dc.contributor.authorKocaay, Deniz
dc.contributor.authorCiofi, Ivan
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.date.accessioned2021-10-22T18:46:27Z
dc.date.available2021-10-22T18:46:27Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25112
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7112777
dc.source.beginpageBD.5
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate19/04/2015
dc.source.conferencelocationMonterey, CA USA
dc.title

Impact of process variability on BEOL TDDB lifetime model assessment

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections: