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Strained germanium quantum well pMOS FinFETs fabricated on in situ phosphorus-doped SiGe strain relaxed buffer layers using a replacement fin process
Publication:
Strained germanium quantum well pMOS FinFETs fabricated on in situ phosphorus-doped SiGe strain relaxed buffer layers using a replacement fin process
Date
2013-12
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Witters, Liesbeth
;
Mitard, Jerome
;
Loo, Roger
;
Eneman, Geert
;
Mertens, Hans
;
Brunco, David
;
Lee, Seung Hun
;
Waldron, Niamh
;
Hikavyy, Andriy
;
Favia, Paola
;
Milenin, Alexey
;
Shimura, Yosuke
;
Vrancken, Christa
;
Bender, Hugo
;
Horiguchi, Naoto
;
Barla, Kathy
;
Thean, Aaron
;
Collaert, Nadine
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1829
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations
Metrics
Views
1829
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations