Publication:

Qualitative determination of the altered layer as a function of ion fluence: buildup, thickness and composition

Date

1999
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorBrijs, Bert
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-06T11:01:50Z
dc.date.available2021-10-06T11:01:50Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3402
dc.source.conferenceSIMS XII; 5-10 September 1999; Brussel, Belgium.
dc.title

Qualitative determination of the altered layer as a function of ion fluence: buildup, thickness and composition

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations