Publication:
The impact of annealing on the corrosion mechanism of copper films
Date
| dc.contributor.author | Ernur, Didem | |
| dc.contributor.author | Carbonell, Laure | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Ernur, Didem | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T04:38:31Z | |
| dc.date.available | 2021-10-15T04:38:31Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7555 | |
| dc.source.beginpage | Z2.7 | |
| dc.source.conference | Mechanisms in Electrochemical Deposition and Corrosion | |
| dc.source.conferencedate | 21/04/2003 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | The impact of annealing on the corrosion mechanism of copper films | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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