Publication:

Impact of oxide liner properties on TSV Cu pumping and TSV stress

Date

2015

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

De Messemaeker, Joke

;

Varela Pedreira, Olalla

;

;

Nabiollahi, Nabi

;

Vanstreels, Kris

;

Van Huylenbroeck, Stefaan

;

Philipsen, Harold

;

Verdonck, Patrick

;

Vandevelde, Bart

;

De Wolf, Ingrid

;

;

Statistics

1953 since deposited on 2021-10-22

Acq. date: 2026-09-15