Publication:

Impact of oxide liner properties on TSV Cu pumping and TSV stress

Date

2015

Proceedings Paper

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Author(s)

De Messemaeker, Joke

;

Varela Pedreira, Olalla

;

;

Nabiollahi, Nabi

;

Vanstreels, Kris

;

Van Huylenbroeck, Stefaan

;

Philipsen, Harold

;

Verdonck, Patrick

;

Vandevelde, Bart

;

De Wolf, Ingrid

;

;

Metrics

1950 since deposited on 2021-10-22

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Acq. date: 2025-12-13