Publication:

Large area microwave plasma CVD of diamond using composite right/left-handed materials

Date

2021
Journal article
https://doi.org/10.1016/j.diamond.2021.108394
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dc.contributor.authorZalieckas, Justas
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorGreve, Martin Moller
dc.contributor.authorEikehaug, Kristoffer
dc.contributor.authorHaenen, Ken
dc.contributor.authorHolst, Bodil
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2022-02-24T11:12:05Z
dc.date.available2022-02-24T11:12:05Z
dc.date.issued2021
dc.identifier.doi10.1016/j.diamond.2021.108394
dc.identifier.issn0925-9635
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39106
dc.publisherELSEVIER SCIENCE SA
dc.source.issuena
dc.source.journalDIAMOND AND RELATED MATERIALS
dc.source.numberofpages6
dc.source.volume116
dc.subject.keywordsLOW-TEMPERATURE DEPOSITION
dc.subject.keywordsSURFACE-WAVE PLASMA
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsGROWTH
dc.subject.keywordsEXCITATION
dc.subject.keywordsGUIDE
dc.subject.keywordsSIMULATION
dc.title

Large area microwave plasma CVD of diamond using composite right/left-handed materials

dc.typeJournal article
dspace.entity.typePublication
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