Publication:
Electroless Rhodium Deposition for Metallization of Advanced Interconnects
Date
| dc.contributor.author | Philipsen, Harold | |
| dc.contributor.author | Viviani, Prisca | |
| dc.contributor.imecauthor | Philipsen, Harold | |
| dc.contributor.orcidimec | Philipsen, Harold::0000-0002-5029-1104 | |
| dc.date.accessioned | 2021-10-31T10:23:31Z | |
| dc.date.available | 2021-10-31T10:23:31Z | |
| dc.date.issued | 2021 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37056 | |
| dc.identifier.url | https://ecs.confex.com/ecs/239/meetingapp.cgi/Paper/146430 | |
| dc.source.beginpage | 1007 | |
| dc.source.conference | 239th Meeting of The Electrochemical Society Symp. G01: Silicon Compatible Emerging Materials, Processes, and Technologies ... | |
| dc.source.conferencedate | 30/05/2021 | |
| dc.source.conferencelocation | Chicago, iL USA | |
| dc.title | Electroless Rhodium Deposition for Metallization of Advanced Interconnects | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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