Publication:

Application of group IV epitaxy in the advanced CMOS fabrication

Date

2018
Meeting abstract
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dc.contributor.authorHikavyy, Andriy
dc.contributor.authorPorret, Clément
dc.contributor.authorRosseel, Erik
dc.contributor.authorVohra, Anurag
dc.contributor.authorLoo, Roger
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorVohra, Anurag
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecVohra, Anurag::0000-0002-2831-0719
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-25T19:52:11Z
dc.date.available2021-10-25T19:52:11Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30897
dc.source.conference2018 Lawrence Symposium on Epitaxy
dc.source.conferencedate18/02/2018
dc.source.conferencelocationScottsdale, AZ USA
dc.title

Application of group IV epitaxy in the advanced CMOS fabrication

dc.typeMeeting abstract
dspace.entity.typePublication
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