Publication:
In situ HDP-CVD process diagnostics based on quadrupole mass spectrometry
Date
| dc.contributor.author | Hughes, Carolyn | |
| dc.contributor.author | Van Hoeymissen, Jan | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.date.accessioned | 2021-10-06T11:23:43Z | |
| dc.date.available | 2021-10-06T11:23:43Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3524 | |
| dc.source.beginpage | 209 | |
| dc.source.conference | Proceedings 1999 IEEE International Symposium on Semiconductor Manufacturing Conference | |
| dc.source.conferencedate | 11/10/1999 | |
| dc.source.conferencelocation | Santa Clara, CA USA | |
| dc.source.endpage | 212 | |
| dc.title | In situ HDP-CVD process diagnostics based on quadrupole mass spectrometry | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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