Publication:
Reduced compositional fluctuations in epitaxial NiAl thin films
| dc.contributor.author | Zhang, Minghua | |
| dc.contributor.author | Scheerder, Jeroen | |
| dc.contributor.author | Soulie, Jean-Philippe | |
| dc.contributor.author | Wu, Chen | |
| dc.contributor.author | Park, Seongho | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Fleischmann, Claudia | |
| dc.contributor.author | Adelmann, Christoph | |
| dc.date.accessioned | 2026-03-30T14:46:04Z | |
| dc.date.available | 2026-03-30T14:46:04Z | |
| dc.date.createdwos | 2025-10-18 | |
| dc.date.issued | 2025 | |
| dc.description.abstract | Despite their favorable resistivity, cohesive energy, and adhesion properties, intermetallic compounds still face challenges related to compositional fluctuations. Here, we have studied this phenomenon in NiAl thin films utilizing atom-probe tomography and reciprocal space mapping. Our results demonstrate a substantial reduction of compositional non-uniformity in epitaxial NiAl layers. Structural characterization via reciprocal space mapping revealed a lattice parameter deviation of less than 0.5% from the bulk NiAl lattice constant, indicating a relaxed epitaxial structure. This strain-minimized epitaxial configuration can be understood as a primary mechanism for the reduction of compositional fluctuations in NiAl, highlighting the potential advantages of strain-relaxed epitaxial intermetallics for advanced interconnect applications | |
| dc.identifier.doi | 10.1109/IITC66087.2025.11075463 | |
| dc.identifier.isbn | 979-8-3315-3782-1 | |
| dc.identifier.issn | 2380-632X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/58966 | |
| dc.language.iso | eng | |
| dc.provenance.editstepuser | greet.vanhoof@imec.be | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Interconnect Technology Conference (IITC) | |
| dc.source.conferencedate | 2025-06-02 | |
| dc.source.conferencelocation | Busan | |
| dc.source.journal | 2025 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, IITC | |
| dc.source.numberofpages | 3 | |
| dc.title | Reduced compositional fluctuations in epitaxial NiAl thin films | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| imec.internal.crawledAt | 2025-10-22 | |
| imec.internal.source | crawler | |
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