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Reduced compositional fluctuations in epitaxial NiAl thin films

 
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cris.virtual.orcid0000-0002-9301-0392
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dc.contributor.authorZhang, Minghua
dc.contributor.authorScheerder, Jeroen
dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorWu, Chen
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorAdelmann, Christoph
dc.date.accessioned2026-03-30T14:46:04Z
dc.date.available2026-03-30T14:46:04Z
dc.date.createdwos2025-10-18
dc.date.issued2025
dc.description.abstractDespite their favorable resistivity, cohesive energy, and adhesion properties, intermetallic compounds still face challenges related to compositional fluctuations. Here, we have studied this phenomenon in NiAl thin films utilizing atom-probe tomography and reciprocal space mapping. Our results demonstrate a substantial reduction of compositional non-uniformity in epitaxial NiAl layers. Structural characterization via reciprocal space mapping revealed a lattice parameter deviation of less than 0.5% from the bulk NiAl lattice constant, indicating a relaxed epitaxial structure. This strain-minimized epitaxial configuration can be understood as a primary mechanism for the reduction of compositional fluctuations in NiAl, highlighting the potential advantages of strain-relaxed epitaxial intermetallics for advanced interconnect applications
dc.identifier.doi10.1109/IITC66087.2025.11075463
dc.identifier.isbn979-8-3315-3782-1
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/58966
dc.language.isoeng
dc.provenance.editstepusergreet.vanhoof@imec.be
dc.publisherIEEE
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC)
dc.source.conferencedate2025-06-02
dc.source.conferencelocationBusan
dc.source.journal2025 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, IITC
dc.source.numberofpages3
dc.title

Reduced compositional fluctuations in epitaxial NiAl thin films

dc.typeProceedings paper
dspace.entity.typePublication
imec.internal.crawledAt2025-10-22
imec.internal.sourcecrawler
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