Publication:
Reduced compositional fluctuations in epitaxial NiAl thin films
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| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-9301-0392 | |
| cris.virtual.orcid | 0000-0002-1058-9424 | |
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| cris.virtual.orcid | 0000-0003-1531-6916 | |
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| cris.virtual.orcid | 0000-0002-4831-3159 | |
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| cris.virtualsource.orcid | 9b758bc9-360a-4678-bf0a-38135e938faa | |
| cris.virtualsource.orcid | d41bbdfd-20df-46cf-9106-e8e19a469a8d | |
| cris.virtualsource.orcid | 96bd0592-0e2f-4dc4-9ae1-955a96d2f29b | |
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| cris.virtualsource.orcid | c1bbf7c6-fe00-4d3e-9b77-5ac76d18c50a | |
| cris.virtualsource.orcid | 5345513e-14d5-47e9-a494-1dda4ed18864 | |
| cris.virtualsource.orcid | 3e839b18-b9e5-46f9-95d4-760837031f7a | |
| dc.contributor.author | Zhang, Minghua | |
| dc.contributor.author | Scheerder, Jeroen | |
| dc.contributor.author | Soulie, Jean-Philippe | |
| dc.contributor.author | Wu, Chen | |
| dc.contributor.author | Park, Seongho | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Fleischmann, Claudia | |
| dc.contributor.author | Adelmann, Christoph | |
| dc.date.accessioned | 2026-03-30T14:46:04Z | |
| dc.date.available | 2026-03-30T14:46:04Z | |
| dc.date.createdwos | 2025-10-18 | |
| dc.date.issued | 2025 | |
| dc.description.abstract | Despite their favorable resistivity, cohesive energy, and adhesion properties, intermetallic compounds still face challenges related to compositional fluctuations. Here, we have studied this phenomenon in NiAl thin films utilizing atom-probe tomography and reciprocal space mapping. Our results demonstrate a substantial reduction of compositional non-uniformity in epitaxial NiAl layers. Structural characterization via reciprocal space mapping revealed a lattice parameter deviation of less than 0.5% from the bulk NiAl lattice constant, indicating a relaxed epitaxial structure. This strain-minimized epitaxial configuration can be understood as a primary mechanism for the reduction of compositional fluctuations in NiAl, highlighting the potential advantages of strain-relaxed epitaxial intermetallics for advanced interconnect applications | |
| dc.identifier.doi | 10.1109/IITC66087.2025.11075463 | |
| dc.identifier.isbn | 979-8-3315-3782-1 | |
| dc.identifier.issn | 2380-632X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/58966 | |
| dc.language.iso | eng | |
| dc.provenance.editstepuser | greet.vanhoof@imec.be | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Interconnect Technology Conference (IITC) | |
| dc.source.conferencedate | 2025-06-02 | |
| dc.source.conferencelocation | Busan | |
| dc.source.journal | 2025 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, IITC | |
| dc.source.numberofpages | 3 | |
| dc.title | Reduced compositional fluctuations in epitaxial NiAl thin films | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| imec.internal.crawledAt | 2025-10-22 | |
| imec.internal.source | crawler | |
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