Publication:

Creep as a reliability problem in MEMS

Date

2004
Journal article
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dc.contributor.authorModlinski, Robert
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorRatchev, Petar
dc.contributor.authorJourdain, Anne
dc.contributor.authorSimons, Veerle
dc.contributor.authorTilmans, Harrie
dc.contributor.authorden Toonder, Jaap M.J.
dc.contributor.authorPuers, Bob
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorSimons, Veerle
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecSimons, Veerle::0000-0001-5714-955X
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-15T14:55:16Z
dc.date.available2021-10-15T14:55:16Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9308
dc.source.beginpage1733
dc.source.endpage1738
dc.source.issue9_11
dc.source.journalMicroelectronics Reliability
dc.source.volume44
dc.title

Creep as a reliability problem in MEMS

dc.typeJournal article
dspace.entity.typePublication
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