Publication:
Validation of vapor phase decomposition - droplet collection - total reflection X-ray fluorescence spectrometry for metallic contamination analysis of silicon wafers
Date
| dc.contributor.author | Hellin, David | |
| dc.contributor.author | Rip, Jens | |
| dc.contributor.author | Arnauts, Sophia | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Vinckier, Chris | |
| dc.contributor.imecauthor | Hellin, David | |
| dc.contributor.imecauthor | Rip, Jens | |
| dc.contributor.imecauthor | Arnauts, Sophia | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-10-15T13:46:38Z | |
| dc.date.available | 2021-10-15T13:46:38Z | |
| dc.date.issued | 2004-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9017 | |
| dc.source.beginpage | 1149 | |
| dc.source.endpage | 1158 | |
| dc.source.issue | 8 | |
| dc.source.journal | Spectrochim. Acta B | |
| dc.source.volume | 59 | |
| dc.title | Validation of vapor phase decomposition - droplet collection - total reflection X-ray fluorescence spectrometry for metallic contamination analysis of silicon wafers | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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