Publication:

Solid phase epitaxy of GeSn alloys on silicon and integration in MOSFET devices

Date

2014
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorLieten, Ruben
dc.contributor.authorMaeda, Tatsuro
dc.contributor.authorSeo, Jin Won
dc.contributor.authorJevasuwan, Wipakorn
dc.contributor.authorHattori, Hiroyuki
dc.contributor.authorUchida, Noriyuki
dc.contributor.authorMiura, Shu
dc.contributor.authorTanaka, Masatoshi
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorVantomme, Andre
dc.contributor.authorJohnson, Brett
dc.contributor.authorLocquet, Jean-Pierre
dc.contributor.imecauthorLieten, Ruben
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVantomme, Andre
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.date.accessioned2021-10-22T03:06:01Z
dc.date.available2021-10-22T03:06:01Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24141
dc.identifier.urlhttp://ecst.ecsdl.org/content/64/11/149.abstract
dc.source.beginpage149
dc.source.conferenceHigh Purity and High Mobility Semiconductors 13
dc.source.conferencedate5/10/2014
dc.source.conferencelocationCancun Mexico
dc.source.endpage160
dc.title

Solid phase epitaxy of GeSn alloys on silicon and integration in MOSFET devices

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
30659.pdf
Size:
561.21 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions